Open Access Nano Express

Passivation mechanism of thermal atomic layer-deposited Al2O3 films on silicon at different annealing temperatures

Yan Zhao, Chunlan Zhou*, Xiang Zhang, Peng Zhang, Yanan Dou, Wenjing Wang, Xingzhong Cao, Baoyi Wang, Yehua Tang and Su Zhou

Nanoscale Research Letters 2013, 8:114 doi:10.1186/1556-276X-8-114

Accesses  

  • Last 30 days: 74 accesses
  • Last 365 days: 442 accesses
  • All time: 442 accesses

Cited by

Google Scholar: View citations

PubMed Central: View citations