Figure 2.

Ball and stick model of a δ-doped Si:P layer viewed along the [110] direction. Thirty-two layers in the [001] direction are shown. Si atoms (small gray spheres), P atoms (large dark gray spheres), covalent bonds (gray sticks), repeating cell boundary (solid line).

Drumm et al. Nanoscale Research Letters 2013 8:111   doi:10.1186/1556-276X-8-111
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