Table 1

Results of the Hall measurement by van der Pauw method 1 cm × 1 cm size
Bulk concentration Conductivity Mobility
(/cm3) (/Ω cm) (Vs/cm)
Si(100)
U(100) 2.7 × 1012 6.7 × 10-4 15,000
L(100) 1.8 × 1015 9.8 × 10-2 350
H(100) 6.0 × 1019 4.3 × 102 45
Si(111)
U(111) 1.0 × 1012 1.7 × 10-4 59
L(111) 1.0 × 1015 6.1 × 10-2 370
H(111) 3.4 × 1019 8.9 × 102 1,600

U, undoped; L, low; H, high.

Choi et al.

Choi et al. Nanoscale Research Letters 2013 8:110   doi:10.1186/1556-276X-8-110

Open Data