Table 1

Summary of estimated and measured thicknesses of TZO films with R2 accuracy greater than 0.995
Sample Number Number of supercycle Estimated thickness (nm) True thickness (nm)
ZnO N/A 500 100.0 106 ± 2.1
Zn/Ti = 20:1 20 25 100.8 101 ± 1.7
Zn/Ti = 10:1 10 50 101.5 95 ± 0.9
Zn/Ti = 5:1 5 100 103.0 94 ± 1.5
Zn/Ti = 2:1 2 250 107.5 84 ± 1.4
Zn/Ti = 1:1 1 500 115.0 80 ± 0.6

Ye et al.

Ye et al. Nanoscale Research Letters 2013 8:108   doi:10.1186/1556-276X-8-108

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