Table 1

The measured layer thickness of films with indexes 1 to 5 grown on Si by SE
Sample ID 1 2 3 4 5
1st layer-TiO2 18.85 8.85 5.87 4.23 2.73
1st layer-ZnO 32.29 15.13 10.67 7.49 5.31
2nd layer-TiO2 8.97 4.81 4.15 2.47
2nd layer-ZnO 15.32 10.37 7.46 5.28
3rd layer-TiO2 4.87 4.13 2.39
3rd layer-ZnO 10.33 7.41 5.32
4th layer-TiO2 4.24 2.38
4th layer-ZnO 7.45 5.28
5th layer-TiO2 2.38
5th layer-ZnO 5.29
6th layer-TiO2 2.36
6th layer-ZnO 5.28
Total thickness (nm) 51.14 48.27 46.92 46.56 46.47

Gu et al.

Gu et al. Nanoscale Research Letters 2013 8:107   doi:10.1186/1556-276X-8-107

Open Data