Open Access Nano Express

Characterization of epitaxial GaAs MOS capacitors using atomic layer-deposited TiO2/Al2O3 gate stack: study of Ge auto-doping and p-type Zn doping

Goutam K Dalapati*, Terence K Shun Wong, Yang Li, Ching K Chia, Anindita Das, Chandreswar Mahata, Han Gao, Sanatan Chattopadhyay, Manippady K Kumar, Hwee L Seng, Chinmay K Maiti and Dong Z Chi

Nanoscale Research Letters 2012, 7:99 doi:10.1186/1556-276X-7-99

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