Table 1 |
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The AD parameters for the Al2O3-polyimide composite thick films |
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Deposition conditions |
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Starting powder |
Ceramic: α-Al2O3 Polymer: polyimide |
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Substrate |
Cu and glass |
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Carrier gas |
He |
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Size of nozzle orifice |
10 × 0.4 mm2 |
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Scanning speed |
1 mm/sec |
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Working pressure |
6-8 Torr |
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Consumption of carrier gas |
1-2 L/min |
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Distance between substrate and nozzle |
10 mm |
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Deposition temperature |
Room temperature |
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Deposition time |
10-40 min |
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Deposition area |
10 × 10 mm2 |
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Kim and Nam Nanoscale Research Letters 2012 7:92 doi:10.1186/1556-276X-7-92 |
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