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Growth behavior of titanium dioxide thin films at different precursor temperatures

Sang-Hun Nam*, Sang-Jin Cho and Jin-Hyo Boo*

Author Affiliations

Department of Chemistry and Institute of Basic Science, Sungkyunkwan University, Suwon, 440-746, South Korea

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Nanoscale Research Letters 2012, 7:89  doi:10.1186/1556-276X-7-89

Published: 26 January 2012


The hydrophilic TiO2 films were successfully deposited on slide glass substrates using titanium tetraisopropoxide as a single precursor without carriers or bubbling gases by a metal-organic chemical vapor deposition method. The TiO2 films were employed by scanning electron microscopy, Fourier transform infrared spectrometry, UV-Visible [UV-Vis] spectroscopy, X-ray diffraction, contact angle measurement, and atomic force microscopy. The temperature of the substrate was 500°C, and the temperatures of the precursor were kept at 75°C (sample A) and 60°C (sample B) during the TiO2 film growth. The TiO2 films were characterized by contact angle measurement and UV-Vis spectroscopy. Sample B has a very low contact angle of almost zero due to a superhydrophilic TiO2 surface, and transmittance is 76.85% at the range of 400 to 700 nm, so this condition is very optimal for hydrophilic TiO2 film deposition. However, when the temperature of the precursor is lower than 50°C or higher than 75°C, TiO2 could not be deposited on the substrate and a cloudy TiO2 film was formed due to the increase of surface roughness, respectively.

TiO2; superhydrophilic; precursor temperature; anatase phase; growth behavior