Figure 4.

FESEM images. Surface FESEM images of the top SiON layer in the SiON/Ag/SiON multilayer as a function of the SiON thickness. Top SiON layer surface with thicknesses of (a) 70, (b) 90, (c) 110, and (d) 130 nm, respectively.

Kim and Cho Nanoscale Research Letters 2012 7:69   doi:10.1186/1556-276X-7-69
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