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Resolution: standard / high Figure 1.
Schematic and structure. (a) Schematic of a continuous R2R sputtering process and (b) structure of the SiON/Ag/SiON multilayer passivation on PES substrate.
Kim and Cho Nanoscale Research Letters 2012 7:69 doi:10.1186/1556-276X-7-69 |
