Discrete As distribution in a Si NW. Cross-sectional view (left) and entire view (right). Red dots show active As atoms in Si. Blue dots, As precipitates; light blue dots, As-V clusters; orange dots, As at the oxide/Si interface; and yellow dots, As in the oxide.
Uematsu et al. Nanoscale Research Letters 2012 7:685 doi:10.1186/1556-276X-7-685