Table 1

Surface roughness and FWHM of ω-scan for (0002) and (10–12) reflections of samples A and B
Sample RMS surface FWHM
(arc sec)
Roughness MQW GaN template
(nm) <0002> <10-12> <0002> <10-12>
A 1.92 339 593 272.3 267
B 2.55 358 639 237 251

RMS, Root mean square.

Sun et al.

Sun et al. Nanoscale Research Letters 2012 7:649   doi:10.1186/1556-276X-7-649

Open Data