Figure 4.

A cross-sectional SEM image (beam voltage of 0.5 kV) of PS diffraction gratings. Gratings were fabricated with a pitch of 4 μm; (a) single-layer grating of height h1 = 500 nm and (b) double-layer grating of heights h1 = 890 nm and h2 = 270 nm.

Lai et al. Nanoscale Research Letters 2012 7:645   doi:10.1186/1556-276X-7-645
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