Figure 2.

Fourier transform infrared spectroscopy spectra. The spectra as a function of SiH4 flow rate at a fixed CH4 flow rate of 10 sccm. Four absorption peaks were observed, and the peak intensities varied with the SiH4 flow rate.

Kim et al. Nanoscale Research Letters 2012 7:634   doi:10.1186/1556-276X-7-634
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