Figure 2.
Fourier transform infrared spectroscopy spectra. The spectra as a function of SiH4 flow rate at a fixed CH4 flow rate of 10 sccm. Four absorption peaks were observed, and the peak intensities
varied with the SiH4 flow rate.
Kim et al. Nanoscale Research Letters 2012 7:634 doi:10.1186/1556-276X-7-634 |
