Table 1

Synthesis conditions for the n-type silicon nanowires
Condition Value
SiH4 + PH3 flow rate 6 sccm + 6 sccm
H2 flow rate 60 sccm
Pressure 1.5 Torr
Substrate temperature 400°C
Radio frequency (13.56 MHz) power density 500 mW/cm2

SiH4 gas is 100% pure, and PH3 gas is 99 % H2 diluted.

Xie et al.

Xie et al. Nanoscale Research Letters 2012 7:621   doi:10.1186/1556-276X-7-621

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