Table 1 |
|
| Synthesis conditions for the n-type silicon nanowires | |
| Condition | Value |
| SiH4 + PH3 flow rate | 6 sccm + 6 sccm |
| H2 flow rate | 60 sccm |
| Pressure | 1.5 Torr |
| Substrate temperature | 400°C |
| Radio frequency (13.56 MHz) power density | 500 mW/cm2 |
SiH4 gas is 100% pure, and PH3 gas is 99 % H2 diluted.
Xie et al. Nanoscale Research Letters 2012 7:621 doi:10.1186/1556-276X-7-621
