Table 2

Summary of triangular microcantilever parameters (SNL and ScanAsyst Fluid) used in LFM study
ScanAsyst Fluid SNL (B)
L (μm) 70 205
w (μm) 10 40
t (μm) 0.6 0.6
H (μm) 8 8
E (GPa) 304 304
ν 0.24 0.24
θ 60° 64.5°
knorm (N/m) 0.74 0.16
Snorm (nm/V) 12.57 26.30
klat (N/m) 19.57 56.16
Slat (nm/V) 1.88 1.27

L, cantilever length; w, cantilever width; t, cantilever thickness; H, stylus height; E, Young's modulus of Si; v, Poisson's ratio of Si; θ, angle between the base arms of the triangular cantilever; knorm, measured cantilever's normal spring constant; Snorm, measured cantilever's normal sensitivity; klat, lateral spring constant calculated from the knorm; Slat lateral normal sensitivity calculated from Snorm[35,36].

Lee et al.

Lee et al. Nanoscale Research Letters 2012 7:608   doi:10.1186/1556-276X-7-608

Open Data