Table 2 |
||
| Summary of triangular microcantilever parameters (SNL and ScanAsyst Fluid) used in LFM study | ||
| ScanAsyst Fluid | SNL (B) | |
| L (μm) | 70 | 205 |
| w (μm) | 10 | 40 |
| t (μm) | 0.6 | 0.6 |
| H (μm) | 8 | 8 |
| E (GPa) | 304 | 304 |
| ν | 0.24 | 0.24 |
| θ | 60° | 64.5° |
| knorm (N/m) | 0.74 | 0.16 |
| Snorm (nm/V) | 12.57 | 26.30 |
| klat (N/m) | 19.57 | 56.16 |
| Slat (nm/V) | 1.88 | 1.27 |
L, cantilever length; w, cantilever width; t, cantilever thickness; H, stylus height; E, Young's modulus of Si; v, Poisson's ratio of Si; θ, angle between the base arms of the triangular cantilever; knorm, measured cantilever's normal spring constant; Snorm, measured cantilever's normal sensitivity; klat, lateral spring constant calculated from the knorm; Slat lateral normal sensitivity calculated from Snorm[35,36].
Lee et al. Nanoscale Research Letters 2012 7:608 doi:10.1186/1556-276X-7-608
