Table 2

Oxidation states of the SiOxfilms obtained by means of the convolution of the XPS curves
Oxidation states
Temperature (°C) dss (mm) Peak position (eV)
Si0+ Si2+ Si3+ Si4+
1,400 2 99.08 101.06 102.16 102.95
1,300 3 99.67 101.98 103.01
1,150 4 99.08 101.47 102.51 103.24
1,050 5 99.02 101.32 102.28 103.16
900 6 99.90 101.36 102.01 103.34

López et al.

López et al. Nanoscale Research Letters 2012 7:604   doi:10.1186/1556-276X-7-604

Open Data