Table 1

Mass distributions of the three atoms, carbon, oxygen, and silicon in the three layers
Carbon (%) Oxygen (%) Silicon (%)
Layer A 77.8 7.5 14.5
Layer B 94.5 2.6 0.7
Layer C 76.1 10.7 12.9

Jitsui and Ohtani

Jitsui and Ohtani Nanoscale Research Letters 2012 7:591   doi:10.1186/1556-276X-7-591

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