Table 1
Mass distributions of the three atoms, carbon, oxygen, and silicon in the three layers
	Carbon (%)	Oxygen (%)	Silicon (%)
Layer A	77.8	7.5	14.5
Layer B	94.5	2.6	0.7
Layer C	76.1	10.7	12.9

Jitsui and Ohtani Nanoscale Research Letters 2012 7:591   doi:10.1186/1556-276X-7-591