Table 1

Process conditions and electrical I-V results found in different electrical studies of vertical metal-PS-Si(P) structures
Paper reference P-type substrate CEl Jetch(mA/cm2) P (%) dPS(nm) tPS(μm) ML PS contact (according to the authors) I-V results Model
OS ρS(Ω cm) Range (V) WF
Ben-Chorin et al. [14] 100 5 HF (49%) + ethanol (1:1) 30 ? 3 to 5 0.5 to 15 Au NiCr In Quasi-ohmic [−100, +100] Quasi-lineara BC
Ben-Chorin et al. [14] 100 0.075 HF (49%) + ethanol (1:1) 100 ? 3 to 5 0.5 to 15 Au NiCr In Quasi-ohmic [−100, +100] Quasi-lineara BC
Balagurov et al. [15] 111 0.005 HF (48%) + ethanol (5:1) 13 30 >10 1.5 to 30 Au Al Ohmic [0, +100] Linearb AN
Bouaïcha et al. [7] 100 1 HF (40%) + ethanol (1:1) ? 48 2 to 5 ? Al Ohmic [0, +5] Nonlinear BC
62
75
Remaki et al. [16] 100 0.02 HF (50%) + ethanol (2:1) 75 50 MESO 1 to 10 Au Schottkyc [−0.5, +0.5] Quasi-lineard BC
Anderson et al. [17] 100 30 to 40 HF (45%) 10 36 ? 0.5 to 5 Al Schottky [−0.5, +0.5] Nonlinear BC
Anderson et al. [17] 111 0.01 to 0.03 HF (45%) 10 23 ? 0.5 to 5 Al Schottky [−0.5, +0.5] Nonlinear AN
Pulsford et al. [18] ? 25 HF + H2O + ethanol (2:3:5) 20 ? ? 1.5 and 135 Ca Mg Sb Au Ag Ohmice [0, +1] Nonlinear BC
Stievenard and Deresmes [19] 100 0.01 HF (40%) + ethanol (1:1) 20 45 MESO 30 Al Schottky [−1, +1] Quasi-lineard AN
Islam et al. [20] 100 6 to 10 HF (48%) + ethanol (1:1) 10 ? MESO 30 to 50 Al Quasi-ohmic [−50, +50] Quasi-linear BC

All the available information about the starting material (the substrate orientation OS and its resistivity ρS), the anodization conditions (the electrolyte composition CEl and the etching current density Jetch), the PS features (the porosity P, the pore diameter dPS, and the PS thickness tPS), the electrical contacts (the metal layer ML used to contact PS and the resulting electrical contact observed according to the authors), and the electrical IV results (the studied voltage range and the waveforms WF of the IV characteristics) are given. Two models coming from Anderson et al. (AN) [17,19] and Ben-Chorin et al. (BC) [21] are used to interpret all the observations. aExcept for PS thickness lower than 2 μm; bspace-charge-limited current is observed for PS thicknesses lower than 28 μm; cnot true in ambient air (quasi-ohmic); donly in ambient air; eimpact of the metal barrier is visible at higher voltage. The question marks were added to avoid bad interpretations of our classification as different behaviors may be observed in the same paper.

Menard et al.

Menard et al. Nanoscale Research Letters 2012 7:566   doi:10.1186/1556-276X-7-566

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