Thermal conductivity of small-diameter (approximately 130 nm) SiNWs (1014cm−3) as a function of porosity. For comparison, the thermal conductivity of the large-diameter SiNW etched at the same condition is shown as the red circle. Increasing nanowire porosity is realized by increasing the H2O2 concentration during MACE, as evidenced by the inset TEM images. The scale bars on all the TEM images are 100 nm.
Weisse et al. Nanoscale Research Letters 2012 7:554 doi:10.1186/1556-276X-7-554