Figure 4.

Thermal conductivity of small-diameter (approximately 130 nm) SiNWs (10¹⁴cm⁻³) as a function of porosity. For comparison, the thermal conductivity of the large-diameter SiNW etched at the same condition is shown as the red circle. Increasing nanowire porosity is realized by increasing the H₂O₂ concentration during MACE, as evidenced by the inset TEM images. The scale bars on all the TEM images are 100 nm.