Table 1

Size, density of dots, and surface RMS roughness values are presented at different fluences
Fluence (ions/cm2) Size of dots (nm) RMS roughness (nm) Density (dots/cm2)
Pristine - 0.2 -
1 × 1017 18.4 ± 2.2 0.5 8 × 1010
3 × 1017 32.6 ± 2.2 0.6 2.8 × 1010
7 × 1017 24.6 ± 2.2 0.3 5.8 × 1010

RMS, root-mean-square.

Kumar et al.

Kumar et al. Nanoscale Research Letters 2012 7:552   doi:10.1186/1556-276X-7-552

Open Data