Table 1 |
|||
| Size, density of dots, and surface RMS roughness values are presented at different fluences | |||
| Fluence (ions/cm2) | Size of dots (nm) | RMS roughness (nm) | Density (dots/cm2) |
| Pristine | - | 0.2 | - |
| 1 × 1017 | 18.4 ± 2.2 | 0.5 | 8 × 1010 |
| 3 × 1017 | 32.6 ± 2.2 | 0.6 | 2.8 × 1010 |
| 7 × 1017 | 24.6 ± 2.2 | 0.3 | 5.8 × 1010 |
RMS, root-mean-square.
Kumar et al. Nanoscale Research Letters 2012 7:552 doi:10.1186/1556-276X-7-552
