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Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles

Ki-Han Ko1, Yeun-Ho Joung1, Won Seok Choi1*, Mungi Park2, Jaehyung Lee3 and Hyun-Suk Hwang4

Author Affiliations

1 School of Electrical, Electronics and Control Engineering, Hanbat National University, Daejeon, 305-719, Republic of Korea

2 LG Display Co., Ltd., 1007 Deogeun-Ri, Wollong-Myeon, Paju, 413-811, Republic of Korea

3 School of Information and Computer Engineering, Sungkyunkwan University, Suwon, 440-746, Republic of Korea

4 Department of Electrical Engineering, Seoil University, Seoul, 131-702, Republic of Korea

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Nanoscale Research Letters 2012, 7:55  doi:10.1186/1556-276X-7-55

Published: 5 January 2012


This study introduces optical properties of a columnar structured zinc oxide [ZnO] antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which were controlled at 0°, 15°, and 30°. The film thickness was fixed at 100 nm to get a constant experiment condition. Grain sizes of the ZnO films were measured by X-ray diffraction. A UV-visible spectrometer was used to measure the transmittance and reflectance of the ZnO film columnar structures as a function of the growth angles.

ZnO film; growth angle; antireflection coating; RF magnetron sputtering; solar cell