Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles
1 School of Electrical, Electronics and Control Engineering, Hanbat National University, Daejeon, 305-719, Republic of Korea
2 LG Display Co., Ltd., 1007 Deogeun-Ri, Wollong-Myeon, Paju, 413-811, Republic of Korea
3 School of Information and Computer Engineering, Sungkyunkwan University, Suwon, 440-746, Republic of Korea
4 Department of Electrical Engineering, Seoil University, Seoul, 131-702, Republic of Korea
Nanoscale Research Letters 2012, 7:55 doi:10.1186/1556-276X-7-55Published: 5 January 2012
This study introduces optical properties of a columnar structured zinc oxide [ZnO] antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which were controlled at 0°, 15°, and 30°. The film thickness was fixed at 100 nm to get a constant experiment condition. Grain sizes of the ZnO films were measured by X-ray diffraction. A UV-visible spectrometer was used to measure the transmittance and reflectance of the ZnO film columnar structures as a function of the growth angles.