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Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage

Lian-Jie Li, Bao Zhu, Shi-Jin Ding*, Hong-Liang Lu, Qing-Qing Sun, Anquan Jiang, David Wei Zhang and Chunxiang Zhu

Nanoscale Research Letters 2012, 7:544  doi:10.1186/1556-276X-7-544