Table 1

Qmax (fQmax) of inductors integrated on localized PS and full PS sheet
Inductor design 100-μm PS 200-μm PS
Surface ratios Localized PS Full PS sheet Surface ratios Localized PS Full PS sheet
Qmax (fQmax GHz) Qmax (fQmax GHz) Qmax (fQmax GHz) Qmax (fQmax GHz)
W10N55R30 0.12 4.7 (2.6) 7.2 (4.7) 0.07 6.9 (3.4) 8.7 (5.4)
W10N55R80 0.13 5.3 (2.3) 6.3 (3) 0.08 - 7.8 (3.2)
W30N15R80 0.12 9.1 (4.2) 12.1 (8.4) 0.07 12.4 (5.3) 22 (12)
W30N35R130 0.22 4.1 (2.2) 6.3 (3.7) 0.15 4.1 (1.9) 7.7 (4)
W50N15R78 0.18 9.4 (3.8) 10.6 (6.6) 0.11 11 (4.6) 17.5 (8)
W50N35R30 0.3 - 6 (2.3) 0.21 4 (1.2) 7.5 (3)
W50N55R175 0.38 3.11 (0.4) 3.8 (0.6) 0.3 - -

Comparison of the Qmax obtained with several inductors integrated on localized and full PS sheet substrates. PS layers, 100- and 200-μm thick, are studied. In each case, Qmax and fQmax are decreased with the PS localization. The surface ratios are the calculated ratios between the surface of the inductor metal coil and the surface of the PS region (the under-mask etching is included in the PS surface). Qmax, maximum Q factors; fQmax, frequency for the one Qmax.

Capelle et al.

Capelle et al. Nanoscale Research Letters 2012 7:523   doi:10.1186/1556-276X-7-523

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