Electric model of an inductor integrated on localized PS. Cross-section view of half an inductor (the pad is in the right side). A simplified electric model has been superposed. The aluminum metal coil and oxide layers are represented respectively in blue and yellow. Cs, Rs and Ls represent the spiral inductance. Cox, Cps and Csi are respectively the capacitances of oxide, PS and Si. Rsi and Raps are the resistances, and Lsi is the inductance of the two materials. M is the mutual inductance between the substrate and the inductor winding.
Capelle et al. Nanoscale Research Letters 2012 7:523 doi:10.1186/1556-276X-7-523