Resolution:
## Figure 5.
Electric model of an inductor integrated on localized PS. Cross-section view of half an inductor (the pad is in the right side). A simplified
electric model has been superposed. The aluminum metal coil and oxide layers are represented
respectively in blue and yellow. C_{s}, R_{s} and L_{s} represent the spiral inductance. C_{ox}, C_{ps} and C_{si} are respectively the capacitances of oxide, PS and Si. R_{si} and R_{aps} are the resistances, and L_{si} is the inductance of the two materials. M is the mutual inductance between the substrate and the inductor winding.
Capelle |