Electrical equivalent circuit of the inductor. Typical ‘pi’ model used as an equivalent circuit of the integrated planar inductor. Cs, Ls and Rs represent respectively the capacitance, inductance and resistance of the inductor. Cox is the capacitance of the oxide. Csub and Rsub are the capacitance and resistance of the substrate.
Capelle et al. Nanoscale Research Letters 2012 7:523 doi:10.1186/1556-276X-7-523