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Resolution: standard / high Figure 3.
Planar inductor integrated. (a) Top view of a W50N25R80 planar inductor. The edge of the PS region is defined by
the dashed line. (b) Tilted cross section of an inductor integrated on the PS region (SEM picture).
Capelle et al. Nanoscale Research Letters 2012 7:523 doi:10.1186/1556-276X-7-523 |
