SIM images during the FIB process. (a) Detection of the nanowire location, (b) removal of the side parts of the template, (c) side view tilted at 60º to expose the nanowire surface, and (d) top view of the processed area after FIB processing. Inset of (d) shows optical microscope image of the processed area.
Murata et al. Nanoscale Research Letters 2012 7:505 doi:10.1186/1556-276X-7-505