Figure 2.

TEM and TED images. (a) TEM image of the as-deposited SSC/SRSC superlattice. HRTEM and TED images of SL: (b) as-deposited and annealed at (c) 800°C, (d) 900°C, and (e) 1,000°C. Dashed lines indicate the surface of substrate Si wafer, and dashed circles indicate the boundaries of nanocrystalline Si.

Moon et al. Nanoscale Research Letters 2012 7:503   doi:10.1186/1556-276X-7-503
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