Table 1

Si wafer characteristics and PS parameters
Template number Si wafer doping Si wafer resistivity, ρ Porosity of PS, p Thickness of PS, d
(Ω·cm) (%) (μm)
PS1 Antimony 0.01 50 to 55 1
PS2 80 to 85
PS3 80 to 85 7
PS4 Boron 0.3 60 to 65 2.5 to 3

Bandarenka et al.

Bandarenka et al. Nanoscale Research Letters 2012 7:477   doi:10.1186/1556-276X-7-477

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