Table 1
Si wafer characteristics and PS parameters
Template number	Si wafer doping	Si wafer resistivity, ρ	Porosity of PS, p	Thickness of PS, d
		(Ω·cm)	(%)	(μm)
PS1	Antimony	0.01	50 to 55	1
PS2			80 to 85
PS3			80 to 85	7
PS4	Boron	0.3	60 to 65	2.5 to 3

Bandarenka et al. Nanoscale Research Letters 2012 7:477   doi:10.1186/1556-276X-7-477