Figure 5.

XPS spectra after Ar+ion irradiation at different energies from 0.25 to 5 keV. The spectrum for the un-irradiated sample is also plotted as a reference. Inset shows the Ar+ ion concentration as a function of irradiation energy.

Al-Harthi et al. Nanoscale Research Letters 2012 7:466   doi:10.1186/1556-276X-7-466
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