Figure 4.

Two-dimensional PSD spectra calculated from 1 × 1 μm AFM images (energies: 1.5 and 5 keV). Obtained after irradiation of the samples at 1.5 and 5 keV. The spectrum for the un-irradiated sample is also plotted for comparison. Inset shows the calculated depth distribution after irradiation of samples at 1.5 and 5 keV.