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Resolution: standard / high Figure 1.
Schematic diagrams of the III-V MOSFET. (a) Cross section of the epitaxial structure, (b) 3D III-V MOSFET with FinFET structure, and (c) SEM image of the submicron GaAs fin and the n+ GaAs contact region.
Chen et al. Nanoscale Research Letters 2012 7:431 doi:10.1186/1556-276X-7-431 |
