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High-performance III-V MOSFET with nano-stacked high-k gate dielectric and 3D fin-shaped structure

Szu-Hung Chen, Wen-Shiang Liao*, Hsin-Chia Yang, Shea-Jue Wang, Yue-Gie Liaw, Hao Wang*, Haoshuang Gu and Mu-Chun Wang*

Nanoscale Research Letters 2012, 7:431 doi:10.1186/1556-276X-7-431

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