Figure 1 .
Schematic cross-section view of 2D photonic lattice fabrication on silicon substrate. (a) Proton beam-writing process and resultant defect distribution. (b) Selective formation of porous silicon in subsequent electrochemical etching in HF electrolyte. (c) Removal of porous silicon in KOH solution.
Dang et al. Nanoscale Research Letters 2012 7:416 doi:10.1186/1556-276X-7-416