Table 1

Thickness and composition of deposited layers
Nominal Impedance Longitudinal
Function Material thickness (nm) (MRayl) velocity (ms1)
Top electrode AlCu 130 17 6,420
W 120 101 5,230
Piezo layer AlN 1300 37 10,400
Bottom electrode W 170 101 5,230
AlCu 200 17 6,420
Coupling layer SiO2 500 13 5,970
Seal to PSi Amorphous Si 20 20 8,400
Porous layer/multilayers PSi variable variable variable

Aliev et al.

Aliev et al. Nanoscale Research Letters 2012 7:378   doi:10.1186/1556-276X-7-378

Open Data