Measured RF S11 spectrum. Green line, the signal magnitude measured on a device on the processed wafer where the BAW actuator stack was deposited onto the bulk Si substrate. The fine features are acoustic modes from the substrate. Black line, signal magnitude measured on a device where the BAW actuator stack was deposited above a PSi ADBR with 30 pairs of layers.
Aliev et al. Nanoscale Research Letters 2012 7:378 doi:10.1186/1556-276X-7-378