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Open Access Nano Express

Porous silicon bulk acoustic wave resonator with integrated transducer

Gazi N Aliev1*, Bernhard Goller14, Paul A Snow1, Helge Heinrich2, Biao Yuan2 and Robert Aigner3

Author Affiliations

1 Department of Physics, University of Bath, UK

2 Advanced Materials Processing and Analysis Center (AMPAC), University of Central Florida, 32816-2455, 4000 Central Florida Blvd., FL, USA

3 TriQuint Semiconductor, , 32703, FL, USA

4 Infineon Technologies AG, , 9500, Siemensstrasse 2, Austria

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Nanoscale Research Letters 2012, 7:378  doi:10.1186/1556-276X-7-378

Published: 9 July 2012

Abstract

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

Keywords:
Porous silicon; Acoustic resonator; BAW filter; Acoustic Bragg mirror