Porous silicon bulk acoustic wave resonator with integrated transducer
1 Department of Physics, University of Bath, UK
2 Advanced Materials Processing and Analysis Center (AMPAC), University of Central Florida, 32816-2455, 4000 Central Florida Blvd., FL, USA
3 TriQuint Semiconductor, , 32703, FL, USA
4 Infineon Technologies AG, , 9500, Siemensstrasse 2, Austria
Nanoscale Research Letters 2012, 7:378 doi:10.1186/1556-276X-7-378Published: 9 July 2012
We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.