Typical EDS spectrum, two-dimensional EDS mapping images, and line profile EDS analysis. (a) Typical EDS spectrum revealing the elemental composition of the selected sample at TA = 400°C. (b) Two-dimensional EDS mapping images of the distribution of elements presented using the lock-in energy of Ti-Kα (4.3 to 4.7 keV), O-Kα1 (0.4 to 0.6 keV), and Zn-Lα (0.8 to 1.2 eV). (c) Line profile EDS analysis clearly showing the presence of O in the sample. The line width of the distribution can be used to define the mean diffusion length <s>.
Shih et al. Nanoscale Research Letters 2012 7:354 doi:10.1186/1556-276X-7-354