Table 2
Comparison of metrological properties of different systems
System	Movement (nm)	Rotation (μrad)
CRB stage	0.4	0.005
Flexure stage	3.8	0.45
Commercial SPM	2	2
Stack piezo	27	40

Comparison of parasitic motion and rotation error for different actuators. Note that for the CRB stage, the parasitic motion could not be measured, as the system could not be disassembled; the values are taken from a single stage datasheet. For the flexure stage, it was measured with one axis fixed. For the commercial SPM, the estimate is taken from AFM measurements of a calibration standard.

Klapetek et al. Nanoscale Research Letters 2012 7:332   doi:10.1186/1556-276X-7-332