Table 2

Comparison of metrological properties of different systems
System Movement (nm) Rotation (μrad)
CRB stage 0.4 0.005
Flexure stage 3.8 0.45
Commercial SPM 2 2
Stack piezo 27 40

Comparison of parasitic motion and rotation error for different actuators. Note that for the CRB stage, the parasitic motion could not be measured, as the system could not be disassembled; the values are taken from a single stage datasheet. For the flexure stage, it was measured with one axis fixed. For the commercial SPM, the estimate is taken from AFM measurements of a calibration standard.

Klapetek et al.

Klapetek et al. Nanoscale Research Letters 2012 7:332   doi:10.1186/1556-276X-7-332

Open Data