|Comparison of metrological properties of different systems|
|System||Movement (nm)||Rotation (μrad)|
Comparison of parasitic motion and rotation error for different actuators. Note that for the CRB stage, the parasitic motion could not be measured, as the system could not be disassembled; the values are taken from a single stage datasheet. For the flexure stage, it was measured with one axis fixed. For the commercial SPM, the estimate is taken from AFM measurements of a calibration standard.
Klapetek et al. Nanoscale Research Letters 2012 7:332 doi:10.1186/1556-276X-7-332