Figure 3.

Mechanical parts of thexypositioning system. Two different mechanisms of linear guidances are used: (A) crossed roller bearing stages and (B) low-stiffness flexures. Note that only the guidance systems with voice coils are shown here; in the complete setup, these are enclosed and hidden by interferometers, sample holder and AFM head.

Klapetek et al. Nanoscale Research Letters 2012 7:332   doi:10.1186/1556-276X-7-332
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