Mechanical parts of thexypositioning system. Two different mechanisms of linear guidances are used: (A) crossed roller bearing stages and (B) low-stiffness flexures. Note that only the guidance systems with voice coils are shown here; in the complete setup, these are enclosed and hidden by interferometers, sample holder and AFM head.
Klapetek et al. Nanoscale Research Letters 2012 7:332 doi:10.1186/1556-276X-7-332