Figure 1.

Schematics of the crossed roller bearing-based stage. (A) The xy motion system (position of the three reference plane sensors and actuators shown as well) and (B) the reference plane system schematics (2D plot; note that in practice, the system has a threefold symmetry as seen from the top view of A).

Klapetek et al. Nanoscale Research Letters 2012 7:332   doi:10.1186/1556-276X-7-332
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