Figure 4.

The AFM picture of a groove and its cross section line. AFM image (a) and its cross section line (b) of a groove formed on TiAlSiN furface, (a)for 265 nm groove; (b) is the cross section line.

Liu et al. Nanoscale Research Letters 2012 7:318   doi:10.1186/1556-276X-7-318
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