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Laser etching of groove structures with micro-optical fiber-enhanced irradiation

Dameng Liu*, Jiachen Liu, Hui Wang and Tianmin Shao

Author affiliations

State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China

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Citation and License

Nanoscale Research Letters 2012, 7:318  doi:10.1186/1556-276X-7-318

Published: 19 June 2012


A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.

Micro-fiber; Laser; Micro-fabrication