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Structure and electrical properties of sputtered TiO2/ZrO2 bilayer composite dielectrics upon annealing in nitrogen

Ming Dong, Hao Wang*, Cong Ye*, Liangping Shen, Yi Wang, Jieqiong Zhang and Yun Ye

Nanoscale Research Letters 2012, 7:31  doi:10.1186/1556-276X-7-31