Table 1 |
|||||
| Lattice parameter and strain and stress of AZO thin films evaluated from XRD patterns | |||||
| Efficiency of NIR (%) | I(002) | dhkl(Ǻ) | c(Ǻ) | ϵ (%) | σfilm(GPa) |
| 20 | 1,225 | 2.63455 | 5.2691 | 1.3302 | −3.0993 |
| 40 | 1,684 | 2.6308 | 5.2616 | 1.1862 | −2.7638 |
| 60 | 1,692 | 2.62335 | 5.2467 | 0.8985 | −2.0936 |
| 80 | 1,823 | 2.6196 | 5.2392 | 0.7554 | −1.7601 |
Jun and Koh Nanoscale Research Letters 2012 7:294 doi:10.1186/1556-276X-7-294
