Table 1

Lattice parameter and strain and stress of AZO thin films evaluated from XRD patterns
Efficiency of NIR (%) I(002) dhkl(Ǻ) c(Ǻ) ϵ (%) σfilm(GPa)
20 1,225 2.63455 5.2691 1.3302 −3.0993
40 1,684 2.6308 5.2616 1.1862 −2.7638
60 1,692 2.62335 5.2467 0.8985 −2.0936
80 1,823 2.6196 5.2392 0.7554 −1.7601

Jun and Koh

Jun and Koh Nanoscale Research Letters 2012 7:294   doi:10.1186/1556-276X-7-294

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