SEM images of the AZO seed layer and ZnO nanorods. (a, b) The AZO seed layer was grown on bare Si and (c, d) ZnO nanorods were grown on AZO seed layer. (e) X-ray diffraction patterns of Al-doped and undoped ZnO films grown on bare Si by ALD.
Baek et al. Nanoscale Research Letters 2012 7:29 doi:10.1186/1556-276X-7-29